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CVD Vacuum Chamber
CVD Vacuum Chamber

CVD Vacuum Chamber

MOQ : 1 Number

CVD Vacuum Chamber Specification

  • Thread Type
  • Metric ISO fine threads on flanges and ports
  • Hardness
  • Rockwell B80-B85
  • Coating
  • Electropolished inner surface
  • Machine Type
  • CVD Vacuum System Integration
  • Method
  • TIG welded construction, helium leak tested
  • Weight
  • Approx. 35 kg
  • Accuracy
  • High vacuum integrity, leak rate < 1x10^-7 mbar l/s
  • Shape
  • Cylindrical chamber with custom flanges
  • Size
  • Diameter: 300 mm; Length: 500 mm (customizable)
  • Load Capacity
  • Up to 50 kg internal fixtures/sample holders
  • Material
  • Stainless Steel 304/316
  • CNC
  • Yes
  • Tolerance
  • 0.005 mm
  • Surface
  • Polished, mirror finish
  • Use
  • Chemical Vapor Deposition processes
  • Application
  • Thin film deposition, semiconductor manufacturing, material research
  • Usage & Applications
  • For laboratory and industrial CVD reactions
  • Temperature Rating
  • Max 350C operating temperature
  • Maintenance
  • Easy disassembly and access for cleaning
  • Internal Mounts
  • Fixed sample holders and custom mounting rails
  • Compliance
  • Meets CE and ISO 9001 standards
  • Feedthrough Ports
  • 4 standard KF/NW ports for electrical/gas/vacuum connections
  • Viewport
  • Quartz glass observation window, 1 pcs
  • Pressure Range
  • Atmospheric to ultra-high vacuum (UHV)
  • Maximum Vacuum Level
  • 10^-7 mbar
  • Pump Compatibility
  • Compatible with rotary, diffusion, and turbomolecular pumps
  • Chamber Volume
  • Approximately 35 liters (standard model)
  • Optional Accessories
  • Heating jackets, temperature controllers, vacuum gauges
  • Sealing
  • Viton O-ring seals, optional metal gasket
  • Electrical Connectivity
  • Optional electrical feedthroughs for sensors & heaters
 
 

About CVD Vacuum Chamber

Discover the elite CVD Vacuum Chamber, a top-ranking solution for thin film deposition, semiconductor manufacturing, and material research. Crafted from splendid stainless steel 304/316 with a flawless mirror-polished interior, this chamber's 35-liter capacity supports up to 50 kg while enduring temperatures up to 350C or UHV (10-7 mbar). Value-driven engineering includes precision CNC machining (tolerance: 0.005 mm), Viton or metal seals, quartz glass viewport, and easy-disassembly for hassle-free maintenance. Buy online now to enjoy outstanding compatibility, compliance, and reliability for laboratory and industrial applications!

Expert Applications and Professional Usage

The CVD Vacuum Chamber is indispensable in research laboratories and industrial facilities specializing in thin film deposition, material synthesis, and semiconductor fabrication. Its flawless electropolished surface ensures chemical compatibility and easy cleaning. Typical users include scientists, research engineers, and manufacturing professionals who demand impeccable control in chemical vapor deposition processes. To use, install the chamber onto your CVD system, set up electrical/gas feedthroughs, and mount samples securely on dedicated rails or holders for optimal results.


Main Domestic Market and Supply Logistics

Primarily serving the Indian market, this splendid CVD Vacuum Chamber is available at a competitive list price. Packing & dispatch processes are meticulously managed to safeguard the polished finish and ensure leak-tight integrity upon arrival. The product is shipped nationwide with robust logistics support and flexible payment terms. With a reliable supply ability, bulk or custom orders are quickly processed for timely delivery, guaranteeing seamless integration into laboratory and industrial setups.


FAQ's of CVD Vacuum Chamber:


Q: How is the vacuum integrity of the CVD Vacuum Chamber ensured?

A: The chamber achieves high vacuum integrity through helium leak testing and TIG welded construction, with tested leak rates below 1x10-7 mbar l/s.

Q: What are the typical usage scenarios for this chamber?

A: It is widely used for chemical vapor deposition, thin film deposition, semiconductor device manufacturing, and advanced material research in both laboratory and industrial environments.

Q: Where can I purchase the CVD Vacuum Chamber and request customization?

A: The chamber is available for online purchase. Customizations, such as size adjustments, additional feedthroughs, and tailored mounting rails, can be requested directly through the supplier or manufacturer's online portal.

Q: What process is followed to maintain the chamber in optimal condition?

A: The chamber is designed for easy disassembly and cleaning. Routine maintenance involves inspecting seals, cleaning the electropolished surfaces, and checking all feedthrough ports for integrity.

Q: What are the benefits of the mirror-polished internal surface and electropolishing?

A: A mirror-polished, electropolished inner surface minimizes contamination and allows for effortless cleaning, critical for producing high purity thin films and advanced semiconductor applications.

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